Low-Cost Maskless Photolithography Using an LCD-3D Printer for Microelectronic Devices
Published in Small Methods, 9(11), e01336, 2025
This paper introduces a low-cost maskless photolithography workflow that streamlines patterning and device fabrication for van der Waals materials.
Recommended citation: Qianjie Lei, Xiaolong He, Kexin He, Yang Liu, Xiang Chen, Antonio Correia, Xinran Zhu, Aitor Yanguas-Gil, Andres Castellanos-Gomez, Yong Xie. (2025). Low-Cost Maskless Photolithography Using an LCD-3D Printer for Microelectronic Devices. Small Methods, 9(11), e01336.
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